半导体氢敏传感器是一种新型气敏元件。
Semiconductor Hydrogen Sensor is a new type of gas-sensitive element.
研究结果对于MOS结构的半导体气敏传感器的研制具有重要的意义。
The investigated results are very important for the research and fabrication of the MOS structure gas sensors.
本文试图对半导体陶瓷气敏元件的敏感机理提出理论模型。
A theoretical model is introduced to explain the basic mechanism of semiconductive ceramics gas sensors.
展望了今后半导体气敏传感器技术的发展趋向。
The technology development trends of metal oxide gas sensors are also discussed.
制作微型化的气体传感器是MEMS应用的主要领域之一。半导体气敏传感器，是当前MEMS气敏传感器的主流。
Currently, micro gas sensors have become one of the major MEMS fields, and semiconductor gas sensors are the mainstream.
阐述了半导体气敏材料的气敏作用及机理；
The gas sensing mechanisms of metal oxide gas sensors are described.
本文提出一种提高半导体电阻式气敏元件选择性的新方法。
A new approach to improve the selectivity of semiconductor gas sensors is put forth.
本文提出一种提高半导体电阻式气敏元件选择性的新方法。
A new approach to improve the selectivity of semiconductor gas sensors is put forth.
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