厚薄膜技术已广泛用于制作气体传感器，在气敏技术中起重要作用。
Thick film and thin film techniques play an important role in gas sensing techniques, which have been widely used in manufacturing the sensors.
膜基气体吸收是膜技术与气体吸收技术相结合的新型杂化膜过程，与传统的气液接触吸收相比有诸多优点。
Membrane based gas absorption is a new combined membrane process that includes membrane technology and gas absorption technology. It has more advantages than the conventional absorption.
气体分膜技术作为未来气体净化、分离的主要研究方向之一，具有广阔的研究和应用前景。
Membrane technologies for gas separation as one of the main directions of the future gas purification and separation has a glorious prospect.
摘要：本文详细介绍了气体离子源增强磁控溅射(气离溅射)反应离子镀膜技术和系统配置。
ABSTRACT: in this paper a reactive ion plating method and system configuration of Gas ion source enhanced Magnetron Sputtering (GIMS) is presented in details.
摘要：本文详细介绍了气体离子源增强磁控溅射(气离溅射)反应离子镀膜技术和系统配置。
ABSTRACT: in this paper a reactive ion plating method and system configuration of Gas ion source enhanced Magnetron Sputtering (GIMS) is presented in details.
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