实验发现，以氟基气体作为工艺气体，铝或铝合金作为掩蔽层时，可以获得极高的选择比；
Experimental results show that higher selectivity can be achieved when fluorine-based gas is used as processing gas and Al or Al alloys are introduced as mask layers.
实验发现，以氟基气体作为工艺气体，铝或铝合金作为掩蔽层时，可以获得极高的选择比；
Experimental results show that higher selectivity can be achieved when fluorine-based gas is used as processing gas and Al or Al alloys are introduced as mask layers.
应用推荐