本发明的实施例关于一种气体分配系统，其可将气体均匀地分配至制程处理室。
Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber.
本发明的实施例关于一种气体分配系统，其可将气体均匀地分配至制程处理室。
Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber.
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