气体出口孔(74,75)和气体通道(70,80)被配置以便利用伯努利定理支撑晶片。
The gas outlet holes (74, 75) and gas channels (70, 80) are configured to support a wafer using the Bernoulli principle.
气体出口孔(74,75)和气体通道(70,80)被配置以便利用伯努利定理支撑晶片。
The gas outlet holes (74, 75) and gas channels (70, 80) are configured to support a wafer using the Bernoulli principle.
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