在极紫外波段，任何材料都存在严重的吸收，因此采用多层膜实现高反射率，是构建正入射式光学系统的唯一途径。
All materials have strong absorption in EUV region. Therefore, using multilayer coatings is the only approach to construct normal incidence optical systems.
在极紫外波段，任何材料都存在严重的吸收，因此采用多层膜实现高反射率，是构建正入射式光学系统的唯一途径。
All materials have strong absorption in EUV region. Therefore, using multilayer coatings is the only approach to construct normal incidence optical systems.
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