通过将横向剪切干涉仪光路展开，得出反射镜角度变化与干涉条纹倾斜角和线对数变化之间的关系。
By unfolded the Lateral Shear Interferometer, the relationship between the line pairs and the tilt of strip with the tilt of reflected mirrors was derived.
将电子散斑测量离面位移的光路引入到高弹性连轴器挠性杆的横向弯曲变形测量中。
The out-plane route of ESPI was introduced for the displacement measurement of flexible lever.
采用全新的光路追踪方案与探针扫描方式，消除了测试过程中横向扫描和纵向反馈带来的误差，开放式的探头设计使液相操作更为便捷。
An innovative laser beam tracking system is proposed to eliminate the tracking and feedback errors. The open probe design of the AFM makes the operation in liquid convenient and easy.
采用全新的光路追踪方案与探针扫描方式，消除了测试过程中横向扫描和纵向反馈带来的误差，开放式的探头设计使液相操作更为便捷。
An innovative laser beam tracking system is proposed to eliminate the tracking and feedback errors. The open probe design of the AFM makes the operation in liquid convenient and easy.
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