用椭圆偏振光谱法研究了热处理对射频辉光放电淀积的氢化非晶碳膜光学性质的影响。
Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated.
用椭圆偏振光谱法研究了热处理对射频辉光放电淀积的氢化非晶碳膜光学性质的影响。
Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated.
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