相对于传统PID主从同步控制方法，同步偏差的移动平均差减小18.2%，移动标准差减小61.5%，可以保证光刻机的曝光效果。
Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.
以这两种方法间的平均差异来计算ct的准确性，以CT测量结果的标准差评估精确度。
Accuracy of the CT method was calculated as the average difference between methods. Precision was measured as the standard deviation of the CT measurement.
以这两种方法间的平均差异来计算ct的准确性，以CT测量结果的标准差评估精确度。
Accuracy of the CT method was calculated as the average difference between methods. Precision was measured as the standard deviation of the CT measurement.
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