模拟结果显示：越细长的沟道，器件的短沟效应越弱，器件的亚阈值斜率随栅氧化层增厚而加大。

The simulated results indicate that thinner and longer channel can reduce short channel effects, while thicker gate oxide will lead to higher subthreshold slopes.

youdao

模拟结果显示：越细长的沟道，器件的短沟效应越弱，器件的亚阈值斜率随栅氧化层增厚而加大。

The simulated results indicate that thinner and longer channel can reduce short channel effects, while thicker gate oxide will lead to higher subthreshold slopes.

youdao