但不足之处是发射电流密度太小和有较大的栅极电流。
But it provides too small emission current density and gives a large gate current.
分别讨论了聚焦极电位、聚焦极孔径以及栅极电位对发射电子束的影响。
Influence of focus electrode bias, focus hole size and grid electrode bias on the emission electron beams was discussed.
该碳纳米管场发射体可防止栅极与碳纳米管之间发生短路。
The field emission body of Nano carbon tube can prevent short circuit from occurring between grid and Nano carbon tube.
利用离子束刻蚀(IBE)和反应离子刻蚀(RIE)等干法刻蚀方法来制造带栅极的场发射阴极阵列。
The gated silicon field emitter arrays (FEA) with small gate aperture have been successfully fabricated by dry etching, including ion beam etching (IBE) and reactive ion etching (RIE).
阴极发射出电子用以加热栅极并和产生的可电离气体原子相碰撞来产生离子。
A cathode emits electrons to heat the grid and to collide with produced ionizable gas atoms to generate ions.
本发明还提供上述场发射装置的制造方法,包括采用蒸镀法在该栅极表面形成该绝缘层。
The present invention also provides the manufacture process of the field emitting device, and the manufacture process includes evaporation step to form the insulating layer on the surface of the grid.
本发明涉及一种场发射装置及其制造方法,用于解决现有技术中场发射装置的栅极截获电流较高的问题。
The present invention is field emitting device and its manufacture process, and aims at solving the problem of great grid intercepted current in field emitting device technology.
本发明提供的场发射装置包括阴极和栅极。该阴极上设有至少一个电子发射端。该栅极与该电子发射端临近的表面上设有绝缘层。
The field emitting device of the present invention includes cathode with at least one electron emitting end and grid with insulating layer in the surface near the electron emitting end.
本发明提供的场发射装置包括阴极和栅极。该阴极上设有至少一个电子发射端。该栅极与该电子发射端临近的表面上设有绝缘层。
The field emitting device of the present invention includes cathode with at least one electron emitting end and grid with insulating layer in the surface near the electron emitting end.
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