本文讨论了与计算机控制系统、工作台驱动系统以及电子束偏转系统有关的一些技术问题并提出了这些技术的发展趋势。
Some technical problems concerned with computer control system, stage driving system, beam deflection system are here discussed to point out their development trends.
这种结构紧凑的三磁铁偏转系统适用于自由电子激光器的束流传输。
The three-magnet bending system is suitable for linac beam deflection of free-electron-laser facility.
CRT显示器偏转系统和电子束的电磁辐射会导致信息泄漏。
Research on spectrum of information electromagnetic leakage form CRT displays is of great importance.
电子束曝光机的偏转系统控制电子束偏转扫描。
The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
介绍了以DX -3扫描电镜为基础，利用SDS -2电子束扫描系统改装其偏转系统。
The deflection system of DX 3 has been rebuilt with SDS 2 system.
介绍了以DX -3扫描电镜为基础，利用SDS -2电子束扫描系统改装其偏转系统。
The deflection system of DX 3 has been rebuilt with SDS 2 system.
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