微机械加速度计的输出受到环境温度的影响。
The output of MEMS accelerometer is influenced by the environment temperature.
讨论了一种梳齿式微机械加速度计的静态模型。
This paper discusses the static model of a multi-finger micromechanical accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
介绍了一种新型基于滑膜阻尼的电容式微机械加速度计。
A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported.
性能指标的提高一直是微机械加速度计领域的重要研究方向。
The improvement of performance has been the important research direction in micromachined accelerometers since its appearance.
在 梳 齿式微机械加速度计的优化设计中，对该方法进行了验证。
The method was proved by being used in the design of a comb-finger micro-accelerometer.
讨论了一种梳齿式微机械加速度计，介绍了表头微机构的特点和系统工作原理。
This paper introduces a multi-finger microaccelerometer based on MEMS technology, and describes the characteristic of the sensor microstructure and the system operation principle.
将谐振原理应用于硅微机械加速度计中，可以改善后者输出信号的质量，降低检测难度。
If resonant elements are adopted in MEMS accelerometer, the quality of the signal output can be improved, and therefore the detection will be easier.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
本文介绍了一种电容式微机械加速度计的数字化处理电路，并重点介绍了数模转换器和模数转换器的温度特性。
A digital processing system based on a capacitive MEMS accelerometer is introduced, the analysis is concentrated on the temperature characteristic of DA and AD.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
本文详细介绍了微机械静电伺服加速度计的系统工作原理、结构和线路设计特点，并对其封装样品作了简要的叙述。
This paper gives the operation principle, the structure and the circuit system designs of the micromachined electrostatic servo accelerometer, and briefly describes its packaged sample.
文中介绍了扭摆式硅微型加速度计的机械结构、工作原理。
The pendulous Si micromechanical accelerator's mechanical structure and the principle of operation are presented.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
为了对微加速度计进行静电-机械耦合场分析，利用ANSYS软件及它的编程语言APDL实现了有限元耦合场分析。
A finite element approach, so called coupled-field analysis, has been developed by ANSYS and APDL to solve the problem of electrostatic-mechanical analysis for micro-accelerometers.
电容式微加速度计的噪声包括机械热噪声和电热噪声；
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
硅微加速度计是一种重要的力学量传感器，是最早受到研究的微机械惯性传感器之一。
Silicon micro-machined accelerometers are one kind of the most important mechanical accelerometers, and also one of the micro-machined inertial sensors that have been studied from the beginning.
硅微加速度计是一种重要的力学量传感器，是最早受到研究的微机械惯性传感器之一。
Silicon micro-machined accelerometers are one kind of the most important mechanical accelerometers, and also one of the micro-machined inertial sensors that have been studied from the beginning.
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