报导了半导体薄膜CO2气体敏感膜的制备，敏感膜的结构特性、温度特性、灵敏度及响应特性和稳定度。
This paper reports the formation of the semiconductor CO2 thin-film and the structure, sensitivity, stability, temperature characteristic and response property of this sensing film.
总结了这两类材料的成膜条件、薄膜表面形态和结构以及它们的敏感特性。
Film preparation conditions, film surface morphology and structure of the two kinds of materials are summarized.
总结了这两类材料的成膜条件、薄膜表面形态和结构以及它们的敏感特性。
Film preparation conditions, film surface morphology and structure of the two kinds of materials are summarized.
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