在光栅固定件中至少设置一个挠曲连接部，它允许基片热膨胀和收缩。
At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the substrate.
在光栅固定件中至少设置一个挠曲连接部，它允许基片热膨胀和收缩。
At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the substrate.
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