冷等离子体提纯与湿法冶金是制造太阳级硅材料的两种重要方法。
Cold plasma purification and hydrometallurgy, having their own merits, were two of the most important methods to prepare low cost solar grade Silicon material.
从理论上分析了利用真空蒸馏的方法除磷提纯冶金级硅的可行性，并进行了真空条件下脱磷的实验研究。
In this paper, a theoretical analysis about the feasibility of phosphorus removal in metallurgical grade silicon with vacuum distillation, then an experiment was conducted.
本发明提出一种多晶硅生产过程中的三氯氢硅分离提纯系统及操作方法。
The invention provides a system for separating and purifying trichlorosilane in production process of polysilicon and an operation method thereof.
本发明提出一种多晶硅生产过程中的三氯氢硅分离提纯系统及操作方法。
The invention provides a system for separating and purifying trichlorosilane in production process of polysilicon and an operation method thereof.
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