一种公共分配中心，向自动化晶片处理系统中的各个部分提供所有的电源、气体、化学原料和其它服务。
A common distribution core that provides all electrical power, gases, chemicals, and other services to the sectors of an automated wafer processing system.
一种公共分配中心，向自动化晶片处理系统中的各个部分提供所有的电源、气体、化学原料和其它服务。
A common distribution core that provides all electrical power, gases, chemicals, and other services to the sectors of an automated wafer processing system.
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