介绍了LIGA加工工艺以及多层掩模技术、复制技术、外形磨削成型技术的现状。
LIGA process and the actualities of multiple masks technology, replication technology and contour polishing technology are introduced.
介绍了LIGA加工工艺以及多层掩模技术、复制技术、外形磨削成型技术的现状。
LIGA process and the actualities of multiple masks technology, replication technology and contour polishing technology are introduced.
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