在常规pid控制系统基础上增加了掩模台精动滑模同步控制器。

A sliding mode synchronization controller of the reticle stage was added to the conventional PID control system.

youdao

在常规pid控制系统基础上增加了掩模台精动滑模同步控制器。

A sliding mode synchronization controller of the reticle stage was added to the conventional PID control system.

youdao