本文提出了一种用光栅分光干涉法测量磁盘平面度的非接触式测量方法。
A grating-differential interferometer for measuring magnetic-disc surface is discussed in this paper.
光学测量法中以光干涉测量技术最为常见和应用广泛，可实现高精度的非接触式振动测量。
Optical measuring method, optical interferometry is the most common and used widely for high accuracy non-contact vibration measurement.
光学测量法中以光干涉测量技术最为常见和应用广泛，可实现高精度的非接触式振动测量。
Optical measuring method, optical interferometry is the most common and used widely for high accuracy non-contact vibration measurement.
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