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论述了电子束扫描正交图形簇产生畸变的非线性校正过程。
						        					            	
				            	The process of nonlinear distortion correction of orthogonal pattern group in E-beam scanning is introduced.
								    										 
								    				            	
				 	    						                 	youdao
				            					            						        	 
		         		 		        			         		
		          					          
		          			                            				          						          				          							        	- 
				           		
论述了电子束扫描正交图形簇产生畸变的非线性校正过程。
						        					            	
				            	The process of nonlinear distortion correction of orthogonal pattern group in E-beam scanning is introduced.
								    										 
								    				            	
				 	    						                 	youdao