着重分析了步进扫描工作台的气浮结构及原理，指出了气浮设计及控制中需要注意的一些问题。
This paper mainly analyzes the pneumatic structure and the principle of the step&scan stage, pointing out some concerned issues in pneumatic design&control.
重点对实现垂直扫描运动的工作台进行了分析。
The stage to realize the vertical scanning motion is analyzed.
为提高扫描电化学显微镜（SECM）微定位系统的运动定位精度，对其压电工作台的数学模型和控制器设计进行了研究。
In order to improve the dynamic positioning precision of scanning electrochemistry microscope(SECM), the mathematic modeling and controller design of the piezo-stage are studied.
熔池中存在的对流和激光扫描过程中工作台运动的不稳定造成了熔池表面波纹状组织和熔池中三维条带状组织的出现。
Two kinds of banded structure caused by convection and unstable moving of the worktable have been observed on the surface of the molten pool and in the melted region.
描述了工作台的工作原理，并对其静态和动态性能进行了测试，实验表明这一扫描系统能很好的应用于共聚焦激光扫描荧光显微镜系统。
This paper describes the principle of the stage, and the testing of the static and dynamic properties. The whole system has been testified to work well for confocal laser scanning microscopy.
整个系统由微机控制，设有自动输涂片机械手装置、显微镜工作台自动二维扫描机构、自动测光、自动拍照等装置。
The system consists of control microcomputer, automatic smear feeding unit, automatic 2-dimension scanning mechanism microscope stage, automatic light detection and automatic photographing unit etc.
为了得到完整的螺纹牙型数据，建立了计算机控制的纵向工作台，可以实现对螺纹投影的逐行扫描。
In order to obtain the 2-D projection data, a longitudinal traveling workbench controlled by computer is set up to realize line by line scan.
为了得到完整的螺纹牙型数据，建立了计算机控制的纵向工作台，可以实现对螺纹投影的逐行扫描。
In order to obtain the 2-D projection data, a longitudinal traveling workbench controlled by computer is set up to realize line by line scan.
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