为了对微加速度计进行静电-机械耦合场分析，利用ANSYS软件及它的编程语言APDL实现了有限元耦合场分析。
A finite element approach, so called coupled-field analysis, has been developed by ANSYS and APDL to solve the problem of electrostatic-mechanical analysis for micro-accelerometers.
为了对微加速度计进行静电-机械耦合场分析，利用ANSYS软件及它的编程语言APDL实现了有限元耦合场分析。
A finite element approach, so called coupled-field analysis, has been developed by ANSYS and APDL to solve the problem of electrostatic-mechanical analysis for micro-accelerometers.
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