本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
然后在微桥上溅射镍—铬电阻薄膜，形成温敏传感器微结构，并对其温度电阻特性，热响应时间进行了测量。
After sputtering with N-Cr, a microstructure of temperature-sensitive sensor was formed, and its character of R-T and thermal response time constant were measured.
本文报道有限元方法在膜片型微结构气敏传感器设计中的应用。
The application of finite element method (FEM) in the design of a membrane-type micro gas sensor is reported.
利用有限元分析工具ANSYS，对所设计的硅基微结构气体传感器的温度场进行了模拟。
The temperature distributing of micro-structure gas sensor based on silicon substrate is simulated by means of finite element analysis (FEA) tool ANSYS.
基于MEMS技术研制了微结构的集成PCR-DNA分子扩增生物芯片，芯片集成了加热子、温度传感器、反应室、进样通道等；
An integrated microstructure PCR-DNA amplification biochip based on MEMS technology was fabricated, which includes heater, temperature sensor, reaction chamber and inlet channels.
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
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