介绍了利用光场控制中性原子束制作微细图形的基本原理。
The basic principle of fabricating nanometer patterns by controlling neutral atoms is introduced in this paper.
介绍了一种功能薄膜微细图形制备新方法—化学修饰溶胶-凝胶法。
A new way called chemically modified sol-gel method for preparing patterned functional films is introduced.
研究结果表明，此技术可实现分辨率高达几个纳米大小的超微细图形制作，制作效率极高。
The results show that the technology can realize super finest patterns of several nanometers and the fabricating efficiency is very high.
本发明是一种用原子制作任意超微细图形的装置，由原子束发生器、真空室、通电线圈、激光束、计算全息编码片和基片等构成。
A device for generating superfine image by atoms is composed of atom beam generator, vacuum chamber, coil, laser beam, computing holographic encoder chip and substrate.
讨论了利用激光微细加工技术，结合软件的智能化控制，按照初始设计好的图形，在金属材料表面或光学玻璃上实现精细雕刻的一种技术。
This paper discuss a kind of technology which can realize fine incise on metal and optical glass according to known figure, with program intelligent controlling.
概述了在微细线路形成中湿式镀工艺的新开发，可以在改性聚酰亚胺膜上形成微细线路图形。
This paper describes new development of wet plating process in micro fine circuit formation. It can form micro fine circuit pattern on improved performance polyimide film.
通过离子束技术和微细加工技术可以实现DLC薄膜的图形化并能大大提高薄膜的场发射性能。
A patterned DLC thin film cathode was fabricated by reactive -ion etching method and mic ro -fabrication technology.
通过离子束技术和微细加工技术可以实现DLC薄膜的图形化并能大大提高薄膜的场发射性能。
A patterned DLC thin film cathode was fabricated by reactive -ion etching method and mic ro -fabrication technology.
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