简要介绍了等离子体技术和微细加工技术。
Plasma technology and micro process technology are presented simply.
微电铸，又称精密电铸，是一种全新的微细加工技术。
As a new micro fabrication technology, micro electroforming I.
随着特征尺寸的不断缩小，微细加工技术的水平逐渐提高。
Along with the characteristic size continuously reducing the micron processing technology's level gradually increase.
介绍了飞秒激光双光子微细加工技术的原理和应用的现状。
The principle and current application of the femtosecond two-photon microfabrication are introduced.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
本文探讨了生物芯片两大理论基础- 分子生物技术和微细加工技术；
The fundamental theory-molecular biotechnology and micro fabrication technology was described in unison.
介绍了一种通过微细加工技术即二次X射线曝光制作凹面光栅的方法。
The technique of fabricating concave gratings in PMMA by double X-ray exposures is described.
本发明是一种利用脉冲激光精确控制曝光时间的方法，用于微细加工技术领域。
The invention discloses a method for accurately controlling exposure time by utilizing pulse laser, which is applied to the technical field of micromachining.
微磨料水射流加工技术正成为制造微细结构零件重要的经济高效的微细加工技术。
Micro abrasive water jet machining (MAJM) is becoming an important machining technique for cost effective micro machining.
提出一种基于集成电路超微细加工技术制造电磁干扰滤波器的薄膜集成制造新技术。
A new technique for fabricating EMIF in thin film IC based on superfine processing technique is proposed.
通过离子束技术和微细加工技术可以实现DLC薄膜的图形化并能大大提高薄膜的场发射性能。
A patterned DLC thin film cathode was fabricated by reactive -ion etching method and mic ro -fabrication technology.
本文在综述国外微细加工技术现状的基础上，重点介绍该技术在航空机载设备元器件制造中的应用。
The present stat of the technology abroad is summarized, on the basis of which applications of such technology to manufacture of parts and components of aeronautical airborne equipments are described.
在此基础上采用飞秒激光双光子微细加工技术制备了典型的微生物器件——微井阵列、微柱阵列和光子晶体生物微型支架。
Using two-photon femtosecond laser micro-processing technology fabricates a typical microbial devices such as micro-well array, micro-pole-array, and photonic crystal micro-biological scaffold.
例如，通过运用微细加工技术来制造计算机芯片时，工作小组创造出了一种场效应晶体管，它是计算机中一个重要的组成部件。
By employing the standard microfabrication techniques used, for instance, in manufacturing of computer chips, the team has created a type of field-effect transistor, a vital computer component.
文章综述了用于制备MEMS器件的几种典型微细加工技术的工艺原理、特点以及研究现状，并展望了这些微细加工技术的发展前景。
The principle of process, characteristic and research status on the several typical microfabrication techniques used to fabricate MEMS devices are given a review in this paper.
讨论了利用激光微细加工技术，结合软件的智能化控制，按照初始设计好的图形，在金属材料表面或光学玻璃上实现精细雕刻的一种技术。
This paper discuss a kind of technology which can realize fine incise on metal and optical glass according to known figure, with program intelligent controlling.
开展了微细电化学加工技术的试验研究工作，内容包括微细电铸和微细电解加工。
This paper is focused on developing micro electrochemical fabrication processes, including micro electroforming and micro electrochemical machining.
根据矿石加工技术性能，可把微细粒金矿分为原生矿和氧化矿。
The micro grain gold can be divided into primary ore and oxidized ore according to the different working performance.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
增强工具电极材料的耐电蚀能力，降低电极损耗是微细电火花加工技术可靠、稳定且高效制造高深宽比微结构和器件的研究关键之一。
Enhancing electrical erosion resistance of tool electrode and reducing electrode wear is one of research keys to fabricate HARMs with micro EDM technology reliably, stably and efficiently.
题开展了微细电解加工技术的试验研究工作。
器件构造工艺采用微细电火花加工技术。
系统地研究了微细电火花铣削的工艺规律 ，提出了超声辅助微细电火花铣削加工技术。
The related key enabling technology for the process of micro milling is presented based on theoretical analyses.
对微细电解铣削加工技术进行了深入研究。
Micro electrochemical milling is proposed as a new method of micro fabrication.
微细切削加工技术在精密三维微小零件制造中的应用，引发了微细制造领域重大的技术变革。
The applications of micro-cutting processing technology to the machining of 3d precision micro components evoked the great technological revolution in the field of micro-manufacturing.
微细切削加工技术在精密三维微小零件制造中的应用，引发了微细制造领域重大的技术变革。
The applications of micro-cutting processing technology to the machining of 3d precision micro components evoked the great technological revolution in the field of micro-manufacturing.
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