实验结果表明其测量精度可达微米量级。
The experimental results demonstrate that micron class resolution is possible.
测量精度为亚微米量级。
该方法对位移的分辨力在亚微米量级，具有较高的测量精度。
The proposed approach has a high precision since the vibrating displacement is measured at submicrometer resolution.
介绍了一种结构简单、制作方便的微米量级大气压等离子体射流。
In the present work, a simply designed and easy made micrometer plasma jet device operating under atmospheric pressure was characterized.
该方法在椭偏成像系统的应用结果验证了其有效性，调焦精度达到微米量级。
Experiment result from imaging ellipsometry system demonstrates its availability and its precision reaches micron order.
在微化工过程中，微米量级的颗粒和液滴表面传递现象的研究具有重要的基础意义。
In the process of microchemical engineering, the research on the transfer phenomena on the surface concerning micrometer-size particle and droplet is of important basic significance.
当特征尺寸进入到微米、亚微米量级时，需要克服“极限”束缚，增加器件的集成度。
When the characteristic size reach micron, submicron degree, overcoming the "limit" binding in order to increase the integration of device.
用该系统对多种微米量级的介质球和生物对象进行了微位移操纵，操纵精度可达纳米量级。
By this system various medium Beads and biological objects with size of micrometer order have been manipulated in a precision of nanometer order.
实验结果表明该算法能准确识别出对准刻线，定位精度可达微米量级，具有一定的实用价值。
The experiment result showed that this method can accurately identify the aligned lines, the positioning accuracy can reach micron grade, and has a certain practical value.
介绍了近年来开展的提高空间分辨率到亚微米量级的研究，提出了未来空间分辨率进一步提高的设想。
Recent researches on the improvement of the spatial resolution in sub-microns are described, and possible solutions to be adopted in the future for improvement of the spatial resolution are proposed.
目前国际上多采用能量为几兆电子伏的离子注入到光学材料内，在表面微米量级的范围内形成波导结构。
Nowadays the ions with energies of several MeV are often implanted into the optical materials to form waveguide structures of several microns beneath the surface of the sample.
超冷原子的德布罗意波波长在微米数量级，所以和它们有关的动力学也再不能用经典物理学来解释。
Ultracold atoms have DE Broglie wavelengths in the micrometer range, and their dynamics can no longer be described classically.
MEMS中大量使用薄膜材料，厚度可达微米、亚微米直至纳米量级。
Thin films are widely used in MEMS with different thicknesses from micron, sub-micron to nanometer scale.
对样品微米至纳米量级区域进行形貌及其物理特性的观测分析。
It is for observation and analysis on the morphology and physical features of samples in a magnitude of micrometer to nanometer.
对样品微米至纳米量级区域进行形貌及其物理特性的观测分析。
It is for observation and analysis on the morphology and physical features of samples in a magnitude of micrometer to nanometer.
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