在设计和加工微小型零件时，由于现有公差数值表缺少对微米和中间尺度的描述，因而使得批量生产和控制表面质量、加工精度极为不便。

The existing tolerance value table is imperfect, resulting in a range of issues such as batch production, surface quality and machining accuracy in designing and processing microminiature parts.

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所述空心齿轮、所述两个或更多行星齿轮以及所述太阳轮中的一个或多个包括多个被超精加工至0.25微米或更小的最终表面粗糙度的轮齿4。

One or more of the hollow wheel gear, two or more planet gears, and sun gear comprise a plurality of teeth 4 that have been superfinished to a final surface roughness of 0.25 micron or less.

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实验表明，该方法可实现微米级无应力加工，并且被加工表面十分光亮。

Experiments show that the method is capable of micrometer-scale machining without heat affected layers and stress, and obtaining smooth lustrous surface.

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实验表明，该方法可实现微米级无应力加工，并且被加工表面十分光亮。

Experiments show that the method is capable of micrometer-scale machining without heat affected layers and stress, and obtaining smooth lustrous surface.

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