在测量硅微电容式加速度传感器时，由于器件信号的微弱和寄生电容的干扰，提高加速度的稳定性和分辨率非常困难。
Due to the parasitic capacitance and weak output signal, which is limited by its dimensions, it is difficult to improve the resolution and stability of micro accelerometer efficiently.
介绍一种采用硅微电容式加速度传感器作为检测部件，应用智能化数据处理技术制成的便携式汽车制动性能测试仪。
A portable vehicle braking test meter is introduced, which appies the technology of intelligent data processing and whose detect component is silicon capacitate acceleration sensor.
硅微加速度计是一种重要的力学量传感器，是最早受到研究的微机械惯性传感器之一。
Silicon micro-machined accelerometers are one kind of the most important mechanical accelerometers, and also one of the micro-machined inertial sensors that have been studied from the beginning.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
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