• ,又称精密电铸一种全新加工技术

    As a new micro fabrication technology, micro electroforming I.

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  • 利用SU -8光刻胶为主要材料,采用多级曝光电铸金属实现3D结构工艺技术研制出了执行器的雏形器件。

    The rudiments of microneedle actuator have been developed, which is mainly made of SU 8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal.

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  • 本文主要阐述LIGA技术工艺过程包括X射线深层光刻微电复制工艺。

    This article mainly explains the process of LIGA technology, which includes X-ray mask lithography, Micro-electroforming and Micro-copy.

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  • 采用线性扫描化学交流阻抗化学测量技术高深宽掩膜条件下微电铸反应动力学过程进行初步研究。

    The kinetics of the electrode reaction is preliminarily studied by linear potential sweep technique and electrochemical impedance while electrodepositing Ni for high aspect ratio structures.

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  • 采用线性扫描化学交流阻抗化学测量技术高深宽掩膜条件下微电铸反应动力学过程进行初步研究。

    The kinetics of the electrode reaction is preliminarily studied by linear potential sweep technique and electrochemical impedance while electrodepositing Ni for high aspect ratio structures.

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