微电铸,又称精密电铸,是一种全新的微细加工技术。
As a new micro fabrication technology, micro electroforming I.
利用SU -8光刻胶为主要材料,采用多级曝光和电铸金属实现3D结构的工艺技术,研制出了微针执行器的雏形器件。
The rudiments of microneedle actuator have been developed, which is mainly made of SU 8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal.
本文主要阐述了LIGA技术的工艺过程,包括X射线深层光刻、微电铸和微复制工艺。
This article mainly explains the process of LIGA technology, which includes X-ray mask lithography, Micro-electroforming and Micro-copy.
采用线性电位扫描和电化学交流阻抗等电化学测量技术 ,对高深宽比掩膜条件下微电铸镍的电极反应动力学过程进行了初步研究。
The kinetics of the electrode reaction is preliminarily studied by linear potential sweep technique and electrochemical impedance while electrodepositing Ni for high aspect ratio structures.
采用线性电位扫描和电化学交流阻抗等电化学测量技术 ,对高深宽比掩膜条件下微电铸镍的电极反应动力学过程进行了初步研究。
The kinetics of the electrode reaction is preliminarily studied by linear potential sweep technique and electrochemical impedance while electrodepositing Ni for high aspect ratio structures.
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