微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
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