微电子机械系统是一项有广泛应用前景的实用技术。
Microelectromechanical system is a promising technology with many applications.
主要讨论了微电子机械系统(MEMS)在相控阵天线中的应用。
Application of Microelectromechanical Systems (MEMS) in phased array antenna is discussed in this paper.
在微电子机械系统(MEMS)中，大高宽比微结构被广泛应用。
Microstructrue with high aspect ratio is widely used in MEMS.
微电子机械系统（MEMS）是多种学科的交叉融合，应用领域极为广泛。
MEMS is an amalgamation of multifold subjects and it can find broad applications in various fields.
文章评述了影响微电子机械系统（MEMS）成品率和可靠性的粘合力和摩擦力问题。
The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
介绍了微电子镀覆在半导体和IC封装、凸点制作、多芯片组件以及微电子机械系统中的应用。
This article describes the application of microelectronic plating in manufacture of semiconductor, IC packaging, micro-bumps, multichip modules and microelectronics mechanical systems.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
本发明涉及一种增加变形梁强度和使用寿命的结构及其应用，属于微电子机械系统(MEMS)领域。
The invention relates to a structure for increasing strength and service life of a deformable beam and an application thereof, belonging to the field of micro-electronic mechanical system (MEMS).
这些微器件与信号调节和处理电路集成后，组成了可执行分布式实时控制的微电子机械系统(MEMS)。
These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.
本文分两部分概要地介绍了美国生物医学界应用MEMS（微电子机械系统）微传感器和MEMS 微系统的研究动向。
This article briefly introduces UK- research trends of MFMS ( microelectronics and machinery system) micro transducers and MEMS microsystems in American biomedical circle.
简要叙述了微电子机械系统（MEMS）研究中的多单元综合体——微型系统，包括它的种类、结构、工作原理及相关的特性。
This paper describes the sorts, structures, operational principles and characteristics of the microsystems, a new popular research field in MEMS.
研究发现，通过合理的选择工艺参数，可以制备具有特定孔隙率的多孔硅薄膜，可广泛的应用于微电子机械系统(MEMS)技术中。
It was found that a certain porosity of PS film to be widely used in MEMS technology can be obtained by selecting optimal process parameters.
微电子机械系统（MEMS）的很多器件均凭借热工作原理，在其设计、性能评估中都需要了解热特性，特别是温度分布的动静态特性。
Many MEMS run on the basis of thermal principles, so it is necessary to know their thermal characteristics, especially temperature distribution, during design and evaluation.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
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