本发明提供能够在处理基体上形成均匀的薄膜的微波等离子体处理装置和气体供给构件。
A microwave plasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.
报道了对多孔硅进行后处理的一种新方法，即真空中微波等离子体辅助的硫钝化处理。
A new method for post treatment of porous silicon, sulfur passivation by microwave plasma assistance in vacuum, is reported in this paper.
分别使用常规消解方法与微波消解方法处理海带样品，采用微波等离子体炬原子发射光谱法（MPT-AES）测定海带中钙和锌的含量。
Microwave plasma torch atomic emission spectrometry(MPT-AES) was used to determine the content of calcium and zinc in kelp after being digested.
分别使用常规消解方法与微波消解方法处理海带样品，采用微波等离子体炬原子发射光谱法（MPT-AES）测定海带中钙和锌的含量。
Microwave plasma torch atomic emission spectrometry(MPT-AES) was used to determine the content of calcium and zinc in kelp after being digested.
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