研制了一种在线式SF_6气体微水含量检测传感器。
A minim moisture content sensor for SF_6 gas measure on-line was studied.
介绍一种新型气体流量传感器——AWM系列微桥式气流质量传感器在微小气体流量测量中的应用。
Microbridge mass airflow sensors of AWM series, a new kind of airflow sensors, applied in micro airflow measurements is presented.
从理论上阐述了微悬桥结构气体流速传感器的工作原理，设计了微悬桥的结构、工艺版图以及其电路系统。
The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
此外，本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
此外，本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
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