为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
微机电安全密码锁是一类用于确保“要害系统”安全性的装置，也可称为微锁、微型组合锁、微型密码鉴别器或微型使用控制开关。
MEMS safety discriminator is a class of safety device for high consequence systems, also termed as micro lock, micro combination lock, micro discriminator or micro use control switch.
介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关，并对其总体结构进行了设计与仿真分析。
A new polyimide (PI) -cantilever MEMS optical switch of electromagnetic actuation is proposed, and the structure of the optical switch is designed and simulated.
介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关，并对其总体结构进行了设计与仿真分析。
A new polyimide (PI) -cantilever MEMS optical switch of electromagnetic actuation is proposed, and the structure of the optical switch is designed and simulated.
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