对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。
The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
应用推荐