随着微机电技术的广泛应用，开发微型化的新型地震计成为发展趋势。
With the fast development and wide application of MEMS (micro Electro-Mechanical Systems), it shows a tendency to develop new micro-seismometers.
首先介绍了用于建筑结构健康监测的主要技术，阐述了新型微机电技术应用于结构健康监测的优势。
This paper firstly introduces the main traditional technology for structural health monitoring, and then describes the new method based on MEMS and its advantages.
对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
主要讨论了微机电系统主要的设计方法以及微机电系统技术在磁力轴承中的应用，最后指出了目前微机电系统技术所面临的主要问题及其发展趋势。
The main design method and the application in the AMB of MEMS are studied in detail. Finally, the main problems and the development trend of MEMS are indicated.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
提出了利用微机电系统（MEMS）技术，采用新的元器件以及数字化中频技术来提高接收机集成度的方法。
Several means adopted in MEMS technique by using new element and IF digitized are put forward to improve integration of the receiver.
回顾了目前利用微机电（MEMS）技术在高效并行显微注射和胚胎定位方面的工作；
In this paper, we reviewed our work on high -throughput microinjection and positioning of embryos using the MEMS technologies.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
无线传感器网络随着传感器技术、微机电系统、现代网络和无线通信等技术的进步孕育而生。
With the development of sensors technology, Micro-Electro-Mechanism System(MEMS), modern networks and wireless communication technology, wireless sensor network (WSN) comes out and develops gradually.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统（MEMS）技术凭借其超精密集成加工的特点，具有微型化、低成本、高可靠性和可大批量生产等优势，在微电接触器件领域大有可为。
MEMS , owning the advantages of ultra fine integrate process , miniaturization, low cost, high reliability and batch manufacturing, pose very promising future in the micro electric contact device.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
论述了微机电系统的技术特征、主要技术和加工工艺，并展望了微机电系统在航天器上的应用前景。
This paper presents the technical characteristics, key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed.
本文报告了一种基于低温共烧陶瓷技术和金锡共晶焊料的射频微机电的封装技术，并评估了该封装结构的物理及射频特性。
This paper reports on an RF MEMS package based on LTCC technology and gold-tin eutectic bonding, and also evaluates physical and RF characteristics of the proposed structure.
介绍一种基于交流采样技术的新型微机电量变送器，并且针对其特点提出了对其自检的方法。
A new type of microcomputer transducer of electric variables is introduced, which is based on AC samples.
加之近年来无线通信、微机电、嵌入式等技术的飞速发展为动物机器人遥控系统的研究设计奠定了良好的基础。
In recent years, the rapid growth of wireless communications, MEMS, embedded technologies laid a good foundation for the research and design of animal-robots remote control system.
本书介绍的微机电系统和微系统的工程设计方法涉及电气和机械两方面技术。
An engineering design approach to Microelectromechanical systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微机电系统已成为人们从微观角度认识和改造客观世界的一种高新技术。
Micro electromechanical system (MEMS) is a kind of high technology with which people understand and change the objective world from microscopic view.
因此，应用微机电系统技术制备的可植入神经假体治疗周围性神经损伤疾病在动物研究和临床工作得到进一步的深入。
Therefore, embedding nerve prosthesis prepared by micro electronic mechanical system (MEMS) technique as treatment for peripheral nerve damage has been dug deeper in animal and clinical study.
因此，应用微机电系统技术制备的可植入神经假体治疗周围性神经损伤疾病在动物研究和临床工作得到进一步的深入。
Therefore, embedding nerve prosthesis prepared by micro electronic mechanical system (MEMS) technique as treatment for peripheral nerve damage has been dug deeper in animal and clinical study.
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