讨论利用微机械加工技术制作传感器的可能性、必然性。
This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.
将微机械加工技术应用于传感器研究，制备一体化薄膜生物传感器。
An integrated thin film microbiosensor was developed based on a micromachining techniques.
采用体微机械加工技术和硅硅键合技术可以实现高性能的加速度传感器。
Using bulk micromachining and silicon bonding we can achieve high-performance full-silicon sandwich accelerometer.
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
近年来，基于压电薄膜技术和微机械加工技术的微型压电器件受到了人们的日益关注。
In recent years, much attention has been paid to novel miniature piezoelectric devices which based on piezoelectric thin film technology and MEMS technology.
采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。
In this paper, the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。
Some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
应用推荐