通用的微机械加工方法可以用于膜制造。
Versatile micromachining methods can be used for membrane fabrication.
讨论利用微机械加工技术制作传感器的可能性、必然性。
This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.
准分子激光在微机械加工，医学，光通讯中具有重要应用。
The excimer laser has important applications in micro-machine process, medicine and optical communication.
微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。
Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.
本文介绍传感器微机械加工中使用的各向异性腐蚀的计算机模拟。
This paper introduces the computer simulation for the anisotropic etching used in micro-machining of sensors.
本文重点介绍微机械加工的几种关键技术和我们的主要研究结果。
Several important techniques in micromachining and our main research results are discuss…
本文设计了一个恒温腐蚀系统，用于微机械加工制作中的腐蚀工艺。
This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
将微机械加工技术应用于传感器研究，制备一体化薄膜生物传感器。
An integrated thin film microbiosensor was developed based on a micromachining techniques.
传感器性能的测试结果表明了微机械加工对提高传感器性能的重要性。
The measuring results of the above sensors indicate that the micromachining is very important to improve their performances.
采用双面对准光刻工艺，各向异性腐蚀微机械加工制硅膜片等新技术。
Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc.
这个二次操作使如此制造的微机械加工的传声器增加了复杂性和成本。
This secondary operation adds complexity and cost to the micromachined microphones so fabricated.
表面微机械加工使用选择的材料和干法和湿法蚀刻工艺以形成电路层。
Surface micromachining USES select materials and both wet and dry etching processes to form the circuitry layers.
采用体微机械加工技术和硅硅键合技术可以实现高性能的加速度传感器。
Using bulk micromachining and silicon bonding we can achieve high-performance full-silicon sandwich accelerometer.
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
介绍了微机械加工中的一项崭新技术——IH工艺，即集成聚合物固化立体光刻。
This process named "IH Process(Integrated Harden Polymer Stereo Lithography)"is a technique for real three dimensional(3D)structure with high aspect ration, and suitable for both polymer and metals.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
近年来，基于压电薄膜技术和微机械加工技术的微型压电器件受到了人们的日益关注。
In recent years, much attention has been paid to novel miniature piezoelectric devices which based on piezoelectric thin film technology and MEMS technology.
第三章给出了等截面悬臂梁微开关的微机械加工工艺，设计了掩膜版及具体的工艺参数。
Chapter three: Presents the fabrication process of micro-switch with cantilever beam and designed the masks.
采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
通常，显微机械加工的部件和电子电路是分开制造的，然后在同一封装块内用线将它们连在一起。
More often, the micromachined part and electronics are fabricated separately and then wire bonded together in a single package.
论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。
In this paper, the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
在车辆表面微机械加工的传感器还通过倾斜控制提供保护，防止循环翻转，并在防抱死制动系统的使用。
Surface micromachined sensors in vehicles also provide protection against roll-overs via tilt control, and are used in anti-lock braking systems.
在加工工艺方面，与体微机械加工相比表面微机械加工具有工艺简单，容易与CMOS电路集成等优点。
Compared with bulk micromachining, the surface micromachining has the advantages of low manufacturing cost and easy integration with CMOS circuits.
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。
Some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
但是制造一个换能器需要利用微机械技术，在一块质地脆硬的陶瓷材料上精心加工，耗费数个小时才能完成。
To make a transducer by painstakingly micro-machining a brittle block of ceramic material can take many hours of work, though.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
本文在一些成功的微流体器件的设计加工基础上，提出了一种计算机控制的微流量测量与控制系统，对各个微机械器件做了介绍，并分析了系统的可行性。
A computer controlled micro flow measuring and controlling system is present on the base of preparing some completed micro flow devices such as micropump and microvalve in this paper.
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