电容式微机械陀螺仪是目前微机械传感器研究的重点。
The parameters of capacitive micromachined gyroscope structure were confirmed by theory research and emulation analysis.
详细论述了一种基于微机械传感器与AT 89 C2 0 51单片机的智能振动传感器。
A smart vibration sensor based on AT89C2051 microcomputer and the micro-accelerometer is described.
讨论利用微机械加工技术制作传感器的可能性、必然性。
This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.
在车辆表面微机械加工的传感器还通过倾斜控制提供保护，防止循环翻转，并在防抱死制动系统的使用。
Surface micromachined sensors in vehicles also provide protection against roll-overs via tilt control, and are used in anti-lock braking systems.
介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。
Some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.
对几类测量加速度的微机械式加速度传感器进行了讨论，并针对每种类别分别选取一种典型的结构，分析了内部的工作原理。
This paper describes several kinds of micro-mechanical acceleration sensors used to measure acceleration, and analyses the internal working principles of these typical structures from each category.
本文介绍传感器微机械加工中使用的各向异性腐蚀的计算机模拟。
This paper introduces the computer simulation for the anisotropic etching used in micro-machining of sensors.
传感器性能的测试结果表明了微机械加工对提高传感器性能的重要性。
The measuring results of the above sensors indicate that the micromachining is very important to improve their performances.
该仪器由机械部分，传感器，硬件电路，软件部分和微机组成。
The instrument is made of mechanical part, fibre sensor, hardware, software and a personal computer.
近年来，微传感器，微执行器和微机械部件得到了深入的研究。
In recent years, micro sensors, micro actuators, and micro mechanical components were lucubrated.
由电池驱动以微机械技术制造的气体传感器的功耗是十分关键的实际问题。
The power consumption of battery-driven micro-machined gas sensors is more critical.
文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
利用微机械体硅工艺及键合技术，把系统中的测试机构、加载机构以及力传感器集成在一个单一的芯片上。
The loading structure, testing part and force sensors were all integrated on a single chip by bulk silicon technology and bonding process.
提出了一种微机械谐振式压力传感器的新结构。
介绍一种新颖的全光型硅微机械流量传感器。
A novel silicon micro mechanical sensor of all optical type is proposed.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
硅微加速度计是一种重要的力学量传感器，是最早受到研究的微机械惯性传感器之一。
Silicon micro-machined accelerometers are one kind of the most important mechanical accelerometers, and also one of the micro-machined inertial sensors that have been studied from the beginning.
将微机械加工技术应用于传感器研究，制备一体化薄膜生物传感器。
An integrated thin film microbiosensor was developed based on a micromachining techniques.
介绍该装置的结构组成、基本工作原理，特别重点介绍了微机械加速度传感器的结构设计、加工工艺流程。
The basic working principle, structural composition of the device was introduced with focuses on structural design and processing technique of the micro-mechanical accelerometer.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
采用体微机械加工技术和硅硅键合技术可以实现高性能的加速度传感器。
Using bulk micromachining and silicon bonding we can achieve high-performance full-silicon sandwich accelerometer.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
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