微机械公司计划生产一种芯片，因为它只使用微小的机械开关，所以不会受到辐射损伤。
Micro-Mechanics plans to produce a chip that, because it uses only microscopic mechanical switches, will be invulnerable to radiation damage.
设计了音叉电容式微机械陀螺检测电路。
The sensing circuit tuning fork micromechanical gyroscope is designed.
微机械加速度计的输出受到环境温度的影响。
The output of MEMS accelerometer is influenced by the environment temperature.
讨论了一种梳齿式微机械加速度计的静态模型。
This paper discusses the static model of a multi-finger micromechanical accelerometer.
微机械陀螺常见的检测方式有电容式和压阻式。
Among the developed micromachined gyros, capacitive detection method is frequently used.
电容式微机械陀螺仪是目前微机械传感器研究的重点。
The parameters of capacitive micromachined gyroscope structure were confirmed by theory research and emulation analysis.
讨论利用微机械加工技术制作传感器的可能性、必然性。
This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.
LIGA技术在微机械结构的制作中具有很重要的作用。
LIGA technology play a very important role in the fabrication of MEMS.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
性能指标的提高一直是微机械加速度计领域的重要研究方向。
The improvement of performance has been the important research direction in micromachined accelerometers since its appearance.
近年来，微传感器，微执行器和微机械部件得到了深入的研究。
In recent years, micro sensors, micro actuators, and micro mechanical components were lucubrated.
利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。
A new type of zine oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology.
文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。
Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.
本文介绍传感器微机械加工中使用的各向异性腐蚀的计算机模拟。
This paper introduces the computer simulation for the anisotropic etching used in micro-machining of sensors.
微夹研究是微机械电子学系统（MEMS）领域的一个前沿课题。
The research on vacuum micro-tool is advance task in the MEMS field.
本文设计了一个恒温腐蚀系统，用于微机械加工制作中的腐蚀工艺。
This paper designs an etching system with constant temperature for etching process in MEMS manufacture.
提出了一种加入AGC功能的微机械陀螺自激驱动电路的实现方法。
A realization method of the self-excitation drive circuit of the micromachined gyroscope with AGC function is presented.
传感器性能的测试结果表明了微机械加工对提高传感器性能的重要性。
The measuring results of the above sensors indicate that the micromachining is very important to improve their performances.
采用双面对准光刻工艺，各向异性腐蚀微机械加工制硅膜片等新技术。
Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc.
根据振动式微机械陀螺的工作原理，建立了其机械特性的等效电路模型。
An equivalent circuit model of vibratory micro - machined gyroscope's mechanical properties is derived according to its working principle.
提出了一种具有自由悬浮敏感膜和带孔铜底板的硅微机械电容式麦克风。
A micromachined condenser microphone with a free floating sensing diaphragm and a perforated thick copper backplate is presented.
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
初步研究表明：非线性对微机械电子系统动力学行为有着严重的重要的影响。
The research indicates that nonlinearity has a very important effect on the dynamical behavior of MEMS system.
介绍了微机械薄膜变形镜光学影响函数的理论表达式以及其具有的线性叠加性。
The mathematical expressions of the optical influence functions for micromachined membrane deformable mirror and their superposition nature are introduced.
提出了一种适用于电容检测型微机械陀螺的信号检测电路并分析了其对噪声的抑制能力。
A circuit used for detecting the signal of the micromachined gyroscope with capacitive detection is pre-sented, and its capability of restraining noise is also analyzed.
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
这些研究成果为微机械的结构设计、性能分析和制造工艺提供磨擦学的基本分析设计方法。
The results can provide the means of analysis and design for the mechanism design and performance analysis of MEMS .
这些研究成果为微机械的结构设计、性能分析和制造工艺提供磨擦学的基本分析设计方法。
The results can provide the means of analysis and design for the mechanism design and performance analysis of MEMS .
应用推荐