针对运营时间超过50年的微型电子机械系统的基于物理放射性核种Ni- 63的电源。
Electrical power source based on radionuclide Ni-63 for micro-electro-mechanical systems with operation time in excess of 50 years.
简要叙述了微电子机械系统（MEMS）研究中的多单元综合体——微型系统，包括它的种类、结构、工作原理及相关的特性。
This paper describes the sorts, structures, operational principles and characteristics of the microsystems, a new popular research field in MEMS.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
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