介绍微型溅射离子泵的结构、工作原理及其在X射线管制造中的应用。
This article described the design, principle of the mini ion pump and its application in the pumping process of X ray tube manufacture.
介绍微型溅射离子泵的结构、工作原理及其在X射线管制造中的应用。
This article described the design, principle of the mini ion pump and its application in the pumping process of X ray tube manufacture.
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