目前，微小型或微型机电系统产品是高附加值的高科技产品。
At present, microminiature or miniature electromechanical systems products are high value-added high-tech products.
微型机电系统将活动的机械部件、传感器和硅片上的电子电路集成在一起。
Microelectromechanical systems integrate moving mechanical elements, sensors and electronics on pieces of silicon.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
本文阐述了微型机电系统(MEMS)领域中微泵的几种常见的致动方式及其特点。
Several common micro mechanical driving modes as well as their characteristic of micro-pump in MEMS field are described in this paper.
微型机电系统是一个新兴的技术领域，其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等，有广泛的应用前景。
MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.
电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。
Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
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