提出一种带有杠杆机构的电容检测微型加速度计。
The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection.
文中介绍了扭摆式硅微型加速度计的机械结构、工作原理。
The pendulous Si micromechanical accelerator's mechanical structure and the principle of operation are presented.
微型加速度计作为一种新型惯性传感器，它在体积、重量、成本、功耗、可靠性和寿命方面都具有传统加速度计无可比拟的优势。
As a new style of the inertial sensor, the micro accelerometer has many advantages over the traditional accelerometer in its bulk, weight, cost, power consumption, reliability and length of life.
提出了一种基于北京大学硅玻璃键合深刻蚀释放工艺的扩展工艺，用来加工微型隧道加速度计。
A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.
本文试图通过采用微型高灵敏度的加速度计解决矢量水听器的小型化问题。
This thesis tries to solve the problem of miniaturizing vector hydrophone by using compact and high sensitivity accelerometer.
本文试图通过采用微型高灵敏度的加速度计解决矢量水听器的小型化问题。
This thesis tries to solve the problem of miniaturizing vector hydrophone by using compact and high sensitivity accelerometer.
应用推荐