在这些器件的制作过程中，铁电薄膜的微图形化是非常重要的一环。
In the preparing process of these devices, the micropatterning of ferroelectric thin films is very important.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
作为一种新型的微图形复制技术，软光刻技术用弹性模替代传统光刻技术中使用的硬模来产生微形状和微结构。
As a newly coming micro fabrication technology, soft lithography use elastomeric stamp to replace hard stamp in traditional lithography to fabricate micro patterns and structures.
通过反应离子刻蚀可以将光刻胶微透镜图形转移至这种高性能的聚合物材料上。
Pattern transfer technique is used to transfer photoresist microlens arrays into the polymer underlayer.
从1980年产生至今，它被用于广泛多样的程序包括微控制固件、操作系统、应用程序和图形设计。
Since its creation in 1980, it has been used for a wide variety of programs including firmware for microcontrollers, operating systems, applications, and graphics programming.
最后给出生成微透镜列阵掩模图形的实例。
Some practical examples for producing mask patterns of micro lens array are given in the end.
即通过在金属基材上形成选择性的导电与不导电图形，来制作深纹的“微杯”金属模具。
The Microcup pattern with insulating material was made on metal substrate and the mould was obtained with follow-up process.
最后给出生成微透镜列阵掩模图形的实例。
Some practical examples for producing mask patterns of micro-lens array are given in the end.
最后给出生成微透镜列阵掩模图形的实例。
Some practical examples for producing mask patterns of micro-lens array are given in the end.
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