微悬臂列阵传感器在生物检测方面具有快速、痕量和非标记的特性。
A method to increase the detection sensitivity and to speed up analysis of microcantilever array biosensor is reported.
根据实际工程需要，对用于萨克·哈特曼波前传感器的二元衍射微透镜列阵衍射效率的评价方法进行了研究。
The evaluation method for the diffractive efficiency of the binary diffractive microlens array used in Shack - Hartmann wavefront sensor is studied according the project requirements.
实验获得了微透镜列阵与红外焦平面集成芯片，并在热成像中取得了良好的结果。
The microlens array and IR focal plane integrated chips are obtained in experiments. These chips have achieved good results in thermal imaging.
本文提出了利用全息再现的方法来制作全息微透镜列阵。
In this paper, we develop a new method for fabricating holographic microlens array based on holographic reconstruction.
本文介绍用制版的方法制作的微菲涅耳透镜列阵及其成像实验。
A method of photo-mask lithography for fabrication of micro Fresnel lenses Arraywas presented in this paper.
通过分析，对微通道热沉材料、冷却液、微通道热沉的结构参数以及热沉与激光器列阵条的封装等进行了优化设计。
Based on the analysis, the heat sink materials, cooling liquid, the heatsink structure, and the bonding of laser bar are optimized in order to increase the transfer efficiency.
本文详细阐述了光刻热熔法的基本原理及微透镜设计方法，并讨论了工艺参数对微透镜列阵质量的影响。
The principle of the method and the design model of refractive microlens are described. The effects of fabrication parameters on the quality of the microlens are discussed.
最后给出生成微透镜列阵掩模图形的实例。
Some practical examples for producing mask patterns of micro lens array are given in the end.
最后给出生成微透镜列阵掩模图形的实例。
Some practical examples for producing mask patterns of micro-lens array are given in the end.
其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。
The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.
其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。
The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.
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