本文利用微光学技术设计并研制了一种同时具有滤波、分束和成象功能的二元光学全互连器件。
A novel binary optical element, which has the functions of filtering, beam-splitting and imaging, is designed and fabricated.
这一研究基本解决了微光学元件的低成本批量生产问题，具有重要的技术和经济价值。
This research work has solved the problem of batch processing micro-optical elements. It is significance in developments of technology and economy.
对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
采用飞秒激光透明材料改性和飞秒激光双光子聚合技术制备了位相光栅和达曼光栅等微光学元件。
Femtosecond laser direct writing in transparent materials and the two-photon photopolymerization technology are used to fabricate the phase-gratings and Dammann grating.
超精密机械加工技术作为微光学元件的一种制造方法，具有很多其他传统方法所不具有的优点。
Precision machining, as a manufacturing technique of micro - optical components, has many advantages which are difficult or even impossible for other traditional methods.
根据菲涅耳衍射理论，采用微光学元件制作技术，通过三次套刻制作出八位相台阶的二元离轴菲涅耳透镜。
A binary Fresnel lens with 8 phase steps can be manufactured with micro-optical element fabricating technology and three times of alignment according to Fresnel diffraction theory.
COF/MEMS封装技术非常适合于诸如微光学及无线射频器件等很多微系统封装的应用。
The COF/MEMS packaging technology is well-suited for many microsystem packaging applications such as micro-optics and radio frequency(RF) devices.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
作者对整个过程进行了考察和讨论，并以微棱镜为例进行了实验验证，为进一步制作大数值孔径连续表面微光学元件打下了技术基础。
As an experimental verification and application of this method, the course and result of the fabrication of micro prism array is provided herein, and some phenomena in the process are discussed.
本文讨论纳米精确度光学对准技术，以用于采用热固化树脂的微光学包装。
This paper discusses a nanometer level precision alignment technique as applied to highly efficient micro optics packaging using heat curable adhesives.
本文讨论纳米精确度光学对准技术，以用于采用热固化树脂的微光学包装。
This paper discusses a nanometer level precision alignment technique as applied to highly efficient micro optics packaging using heat curable adhesives.
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