此微位移检测方法已用于弹性元件刚度测量仪中，并采用激光干涉仪进行标定。

We applied this method to the stiffness measurement of flexible parts, and located the displacement with the help of laser interferometer.

youdao

此微位移检测方法已用于弹性元件刚度测量仪中，并采用激光干涉仪进行标定。

We applied this method to the stiffness measurement of flexible parts, and located the displacement with the help of laser interferometer.

youdao