然后在氧等离子体中用电子束刻蚀法去除沟道区石墨烯形成晶体管的沟道。
They then defined the transistor channel using electron-beam lithography, removing graphene outside of channel regions with an oxygen plasma.
模拟计算表明，利用薄体效应，可以形成以单晶硅为衬底的，阈电压较低的新型薄膜MOS晶体管。
The simulation presupposes that it is possible to develop new MOS thinfilm transistors with crystal silicon substrate and lower threshold voltage.
在本发明的一具体实施例中，此元件包含一基板和一形成于基板上的晶体管。
In an embodiment, the device includes a substrate and a transistor formed on the substrate.
在本发明的一具体实施例中，此元件包含一基板和一形成于基板上的晶体管。
In an embodiment, the device includes a substrate and a transistor formed on the substrate.
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